Description

• Provides high-efficiency protection for 300mm wafers during transportation and storage.
• Excellent air tightness and inflation function can maintain a clean environment inside the FOUP to reduce risk of contamination.
• Customized modifications can also be made according to the equipment parameter settings to ensure the compatibility of the FOUP and equipment.
  
  

Specification

• Dimension：L350.5 * W412 * H337mm
• Substrate：300mm wafer
• Capability：13pcs & 25pcs