Description

• FOUP specialized for advanced packaging processes such as CoWos, SoIC, and HBM
• Integrated design to hold film frames used in dicing and grinding stages
• Compatible with automated transportation systems such as load ports, EFEM, and AMHS
• Equipped with a gas purging function
  
  

Specification

• Size：12 inch film frame
• Capacity：13pcs
• Pitch：10mm
• Weight：<4kg