Description

• FOUP specialized for advanced packaging processes
• Integrated design of the shell, OHT, and slots, ensuring uniform electrostatic dissipation and excellent rigidity
• Compatible with automated transportation systems such as load ports, EFEM, and AMHS
• Equipped with a gas purging function
  
  

Specification

• Demension：L353.5 * W414.5 * H337mm
• Substrate：panel 300*300mm, 310*310mm
• Capacity：13pcs
• Pitch：20mm