Panel FOUP
Description
- Provides high-efficiency protection for Panel/ABF/Glass during transportation and storage, and maintains a clean environment inside the FOUP.
- Suting also provid customization for substrate size and capcacity to carry customer's product.
- Equipped with a gas purging function.
Specification
- Dimension:L600 * W620 * H438mm
- Substrate:panel 510*515mm, 600*600mm, 515*620mm
- Capability:6pcs, 12pcs(standard), 16pcs(customized)
- Pitch:50mm/6slot, 25mm/12slot
- Weight:≦25kg